Electron spin and cyclotron resonance of laser annealed silicon
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چکیده
منابع مشابه
Electron spin and cyclotron resonance of laser annealed silicon
EPR and cyclotron resonance investigations have been performed on laser annealed Si wafers, leading to the identification of the [V + Oi]complex in virgin Si and to a donor signal quenching in P-implanted Si. Revue Phys. Appl. 15 (1980) 21-23 JANVIER 1980, PAGE 1 Classification Physics Abstracts 73.20Hb 76.30 79.20Ds Introduction. Laser annealing techniques have been investigated recently for i...
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ژورنال
عنوان ژورنال: Revue de Physique Appliquée
سال: 1980
ISSN: 0035-1687
DOI: 10.1051/rphysap:0198000150102100